MAIA3 from TESCAN is a newly developed analytical scanning electron microscope which demonstrates ultra-high resolution of 1 nm at 15 kV. The resolution performance at 1 kV is 1.4 nm using secondary electrons and 0.8 nm at 30 kV in STEM mode. This powerful instrument is based on TESCAN’s proven three-lens column equipped with a Schottky field emission gun.
The spectacular resolution at low voltages is achieved by the unique construction of TESCAN’s 60 degree immersion objective lens which decreases optical aberrations dramatically compared to a conventional lens. An additional intermediate lens can operate simultaneously with, or instead of, the objective lens providing the possibility of multiple display modes.
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