The LYRA3 FEG is a favorable combination of SEM and FIB for demanding users. It is based on a high resolution Schottky FEG-SEM column and a high performance FIB column.
This new generation of field emission scanning electron microscopes (LYRA3 series) provides users with the advantages of the latest technology, such as new improved high-performance electronics for faster image acquisition, an ultra-fast scanning system with compensation for static and dynamic image aberrations or built-in scripting for user-defined applications, all the while maintaining the best price to performance ratio.
The LYRA3 series was designed with respect to a wide range of FIB-SEM applications and needs in today’s research and industry. Its excellent resolution at high beam currents has proved to be advantageous for analytical applications such as EDX, WDX, EBSD, 3D tomography, etc. Their powerful software turns these TESCAN FIB-SEMs into excellent tools for other applications, such as e.g. electron/ion lithography, TEM sample preparation, etc.
LYRA3 focused ion beam scanning electron microscope is manufactured in configurations with XM and GM chambers.
High Performance Ion Optics
User-Friendly Software and Software Tools